Details

Technische Universität Hamburg-Harburg

Institut für Mikrosystemtechnik
Eißendorfer Straße 42
D - 21073 Hamburg
Germany

Phone: +49 (0) 40-42878-4398
Fax: +49 (0) 40-42878-2396

E-Mail: trieu@tuhh.de
Web: www.tu-harburg.de/mst/

The Institute of Microsystems Technology at TU Hamburg-Harburg conducts research and development in the areas of medical engineering, micro sensors and lifesciences using an hollistic approach of modelling, process technology and system integration for the realisation of system solutions. Apart from micro implants among others highly sensitive micro mass spectrometers, micro optical interferometers for the micro analytics as well as microfluidic systems for the biosystem technology are developed. Novel sensor materials, flexible fabrication techniques and innovative energy harvesting and transponder technology characterize our works.

Product range

2.1.102	Mechanical parameters
2.1.104	Thermal parameters
2.1.106	Atmospheric parameters
2.1.107	Meteorological parameters
2.1.111	Chemical parameters
2.1.112	Biological parameters
2.1.113	Medical parameters
2.1.203	Fluidic applications
2.2.02	Thin film technology
2.2.07	Microstructuring of silicon
2.2.08	Microstructuring of other materials [glas, ceramic, metals, polymers]
2.2.13	microoptics, Integrated optics
2.2.14	Assembly and interconnection, packaging
2.3.02	Component simulation, especially using FEM
2.3.05	System simulation
2.4.01	Assembly and connection
2.4.02	Packaging
2.4.03	Fluidic interconnections
2.4.05	Communication interfaces
2.4.06	Signal processing and algorithms
3.3.03	Thin film technology
3.3.04	Semiconductor Technology
3.3.11	Microsystems technology
3.3.12	Microsensor technology
3.3.13	Microactuator technology
3.3.14	Microfluidics, micropneumatics
3.3.15	Micromechanics, microstructuring
3.3.16	Integrated optics, microoptics
4.22	Technology consulting
4.30	Training, continued education

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The Teaser

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