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University of Utah
Microsystems Laboratory
MEB 3280, 50 S Central Campus
USA - Salt Lake City, UT
United States of America
Phone: +1-801-581-7408
Fax: +1-801-581-5281
E-Mail: solzbach@ece.utah.edu
Web: www.microsystems.utah.edu
MEB 3280, 50 S Central Campus
USA - Salt Lake City, UT
United States of America
Phone: +1-801-581-7408
Fax: +1-801-581-5281
E-Mail: solzbach@ece.utah.edu
Web: www.microsystems.utah.edu
The Microsystems Lab is an integral part of the Utah Microfabrication Facility, a 4000 sqft. Cleanroom laboratory for semiconductor and Polymer processing. The Microsystems Lab focuses on new materials (SOI, SiC, GaN, metallization systems) and the development, fabrication and characterization of Microsystems for harsh environments (i.e. elevated temperatures, aggressive gas and fluid media). The microsystems Lab primarily acts as contractor for government institutions and industrial partners.
Product range
| 1.4.0001 | Special materials |
| 3.3.03 | Thin film technology |
| 3.3.04 | Semiconductor Technology |
| 3.3.11 | Microsystems technology |
| 3.3.12 | Microsensor technology |
| 3.3.13 | Microactuator technology |
| 3.3.14 | Microfluidics, micropneumatics |
| 3.3.15 | Micromechanics, microstructuring |
| 3.3.60 | Laser processing |
| 3.3.61 | Etching |
| 3.3.63 | Bonding |
| 4.04 | Customised measurement services |
| 4.22 | Technology consulting |
| 4.30 | Training, continued education |
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