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Fraunhofer Institut
f. Elektronenstrahl- und Plasmatechnik – FEP
Winterbergstr. 28
D - 01277 Dresden
Germany
Phone: +49 (0) 351-2586-105
Fax: +49 (0) 351-258555-105
E-Mail: info@fep.fraunhofer.de
Web: www.fraunhofer.de
Winterbergstr. 28
D - 01277 Dresden
Germany
Phone: +49 (0) 351-2586-105
Fax: +49 (0) 351-258555-105
E-Mail: info@fep.fraunhofer.de
Web: www.fraunhofer.de
FEP develops specialized sputter processes for the fabrication of transducer and actoric elements on industrial equipment like cluster tools and linear inline systems up to 1000mm substrate size. FEP has extended experience in optical, insulation and passivation layers, permeation barriers as well as piezoelectric and magnetic functional layers.
Product range
| 2.1.108 | Optical parameters |
| 2.2.02 | Thin film technology |
| 3.3.03 | Thin film technology |
| 3.3.04 | Semiconductor Technology |
| 3.3.20 | Nano Technology |
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