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Fraunhofer-Institut
f. Photonische Mikrosysteme IPMS

Maria-Reiche-Str. 2
01109 Dresden
Germany
phone+49 351 8823-0
fax+49 351 8823-266
emailinfo@ipms.fraunhofer.de
urlhttp://www.ipms.fraunhofer.de

The Fraunhofer Institute for Photonic Microsystems IPMS stands for applied research and development in the areas of industrial production, medical technology and improved quality of life. Research focuses on miniaturized sensors and actuators, integrated circuits, wireless data communication and customer-specific MEMS systems. We offer our customers complete solutions, from concept and technology development to pilot production in our own clean room.

S.01.02.05 Pressure (gauge) – measuring error < 0.1 %

S.01.02.06 Pressure (gauge) – measuring error ≥ 0.1 %

S.01.07.05 Ultrasound

S.01.09.05 Ion-selective sensors, e.g. Na+, Cl-

S.01.09.09 pH value

S.02.04 Piezoresistive sensing element

S.02.23 Photo cell, photo sensor

S.02.25 Optoelectronic element

S.02.32 Ultrasound measuring cell

S.02.36 ISFET sensor element

S.03.27 Communication module, wireless

S.03.45.07 Electrostatic actuator

S.03.45.14 Micropump

M.09.06.01.01 Ultrasonic processes

M.09.06.01.07 AOI (automatic optical inspection)

D.01.02.04.02 Mechanical parameter

D.01.02.04.08 Optical parameter

D.01.02.08.08 Microstructuring of silicon

D.01.02.08.09 Micro Systems Technologies MST, Micro-Electro-Mechanical-Systems MEMS

D.01.02.08.17 Microoptics, integrated optics

D.02.04 Semiconductor technology

D.02.11 Microsystems technology MST / Micro-Electro-Mechanical-Systems MEMS

D.02.12 Microsensor technology

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