Here you can search Members and Suppliers

Albert-Ludwigs-Universität Freiburg
IMTEK - Institut für Mikrosystemtechnik

Georges-Köhler-Allee, Geb. 103
79110 Freiburg
Phone+49 761 203-98584
Fax+49 761 203-7222

R&D on MEMS, microoptics, microfluidics, sensors and actuators. Silicon micromachining, ASICs, thin films, assembly and packaging as well as polymer and ceramic microparts. New methods for design, simulation, testing and characterisation. Applications in life science, medicine as well as in traffic systems.

Product range

D.01.03.01 Process and technology simulation

D. CMOS-technology or technology steps

D. Optical lens

D.01.04.09 Measurement electronics

D. Active component

D. Software development for measurement and testing technology

D. Optical parameter

D. General electronic HW, SW

D. Lithography (E-beam-, UV-, X-ray lithography)

D.01.03.05 System simulation

S.03.02 Semi-finished part for sensors

D. Semiconductor

D. Dynamic parameter

D.01.04.06 System development embedded system

D. Chemical parameter

D. Semi-finished part for sensors

D. Micro Systems Technologies MST, Micro-Electro-Mechanical-Systems MEMS

D.04.07 Training-on-the-project

S.01.10.08 Nitrous oxides NOx

D. Magnetic material

D. Plasma-/surface technology

D. Precision mechanics

D. Fluidic application

D. Housing

D. Plastic and polymers

S.01.09.03 Oxygen, dissolved

D.01.03.03 Analog simulation

D. Ceramic material

D. Galvanic processing

D.04.06 Training, continued education

D.01.04.03 Fluidic interconnection

D. Atmospheric parameter

D.01.03.06 Performance verification & reliability analysis

D. Electrical or magnetic parameter

D. Mechanical parameter

D. Fiber optics

D. Acoustical parameter

D. Biological parameter

S.01.09.08 Concentration in liquids

D. Electronic sensor interface

D. Replication technology (Injection molding, hot embossing)

S.01.09.22 Lactate

D. Signal processing and algorithm

D.01.04.01 Assembly and packaging

D.04.10 Consulting in Micro Systems Technologies, MEMS

D. Casting compound, resin

D.01.03.09 Magnetic field simulation

D. Thin film technology

D. Optical component

D.01.04.02 Packaging

D. Passive component

D. Meteorological parameter

D.01.04.07 System development wireless sensor network

S.01.09.05 Ion-selective sensors, e.g. Na+, Cl-

D. Ceramic technology

D.01.03.07 Optics simulation, raytracing

D. Thick film technology

D. Plastics technology

D. Thermal application

D. Microstructuring of other material (glas, ceramic, metal, polymer)

D. Optoelectronic integrated circuit, OEIC

D. Microstructuring of silicon

S.01.09.01 Electrochemical conductivity

S.01.09.21 Glucose

D. Fieldbus technology, wireless, embedded controller, FPGA

D.01.03.04 Digital simulation

D. Software development, sensor specific

D. Micro fluidic device

D. Caloric parameter

D. Microoptics, integrated optics

D.01.04.10 Assembly and packaging for medical technology

D.01.03.02 Component simulation, particularly with FEM

D. Assembly and packaging