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Technische Universität Hamburg-Harburg
Institut für Mikrosystemtechnik

Eißendorfer Str. 42
21073 Hamburg
Phone+49 40 42878-4398
Fax+49 40 42878-2396

The Institute of Microsystems Technology at TU Hamburg-Harburg conducts research and development in the areas of medical engineering, micro sensors and lifesciences using an hollistic approach of modelling, process technology and system integration for the realisation of system solutions. Apart from micro implants among others highly sensitive micro mass spectrometers, micro optical interferometers for the micro analytics as well as microfluidic systems for the biosystem technology are developed. Novel sensor materials, flexible fabrication techniques and innovative energy harvesting and transponder technology characterize our works.

Product range

D.02.01 Strain gauge technology

D.01.04.09 Measurement electronics

D.02.11 Microsystems technology MST / Micro-Electro-Mechanical-Systems MEMS

D. Assembly and packaging

S.01.10.02 Oxygen O, gaseous

D. Dynamic parameter

D.02.19 Assembly and packaging

D.02.16 Integrated optics, microoptics

D.02.04 Semiconductor technology

D. Plasma-/surface technology

D. Mechanical parameter

S.01.09.17 Pulse rate

D. Thin film technology

D. Signal processing and algorithm

D.04.15 Technology consulting

S.01.02.04 Pressure, absolute

S.01.09.03 Oxygen, dissolved

D.01.04.05 Communication interface

D.01.04.01 Assembly and packaging

D.01.04.02 Packaging

D.02.13 Microactuator technology

D.02.12 Microsensor technology

D. Medical parameter

S.01.04.05 Thermal conductivity

S.01.09.22 Lactate

S.01.09.18 Pulse oximetry, SpO2

D.01.03.02 Component simulation, particularly with FEM

D. Fluidic application

D. Chemical parameter

D. Microstructuring of silicon

M.01 Telemetry system and components

D. Thermal application

S.01.03.16 Flow

D. Biological parameter

D. Atmospheric parameter

D.02.43 Prototype manufacture

D.02.08 Plastics technology

S.01.09.21 Glucose

S.01.04.01 Temperature, with contact

D.02.42 Actuator-specific

D. Thermal parameter

D.04.06 Training, continued education

D.02.30 Bonding

D.02.03 Thin film technology

D.02.15 Micromechanics, microstructuring

S.01.04.02 Temperature, contactless

D.02.20 Nano technology

S.01.02.03 Stress, strain, elongation

D. Microoptics, integrated optics

D.02.29 Galvanic processing

D. Meteorological parameter

D. Micro Systems Technologies MST, Micro-Electro-Mechanical-Systems MEMS

D.01.04.03 Fluidic interconnection

D.02.41 Other services concerning sensor systems and actuators

S.02.21 Thermocouple

S.02.01 Strain gauges, in general

D. Microstructuring of other material (glas, ceramic, metal, polymer)

S.01.09.15 Blood pressure, non-invasive

D.02.14 Microfluidics, micropneumatics

S.01.09.06 Mass spectrometer