University of Utah
Microsystems Laboratory
UT-84112 Salt Lake City
USA
fax+1 801 581-5281
The Microsystems Lab is an integral part of the Utah Microfabrication Facility, a 4000 sqft. Cleanroom laboratory for semiconductor and Polymer processing. The Microsystems Lab focuses on new materials (SOI, SiC, GaN, metallization systems) and the development, fabrication and characterization of Microsystems for harsh environments (i.e. elevated temperatures, aggressive gas and fluid media). The microsystems Lab primarily acts as contractor for government institutions and industrial partners.