University of Utah
Microsystems Laboratory

50 S Central Campus Drive
UT-84112 Salt Lake City
USA
phone+1 801 581-7408
fax+1 801 581-5281

The Microsystems Lab is an integral part of the Utah Microfabrication Facility, a 4000 sqft. Cleanroom laboratory for semiconductor and Polymer processing. The Microsystems Lab focuses on new materials (SOI, SiC, GaN, metallization systems) and the development, fabrication and characterization of Microsystems for harsh environments (i.e. elevated temperatures, aggressive gas and fluid media). The microsystems Lab primarily acts as contractor for government institutions and industrial partners.

S.03.01 Special material

D.02.03 Thin film technology

D.02.04 Semiconductor technology

D.02.11 Microsystems technology MST / Micro-Electro-Mechanical-Systems MEMS

D.02.12 Microsensor technology

D.02.13 Microactuator technology

D.02.14 Microfluidics, micropneumatics

D.02.15 Micromechanics, microstructuring

D.02.27 Laser processing

D.02.28 Etching technology

D.02.30 Bonding

D.04.01 Measuring service

D.04.06 Training, continued education

D.04.15 Technology consulting