htw saar
Forschungsgruppe Sensorik und Dünnschichttechnik

Goebenstraße 40
66117 Saarbrücken
Phone+49 681 5867-67
Fax+49 681 5867-11

In several years of research the "Sensors and Thin Film Group" has developed novel nanoscale functional sensor layers, which combine high gauge factors (between 2 and 30) and elevated operating temperature. The platform technology is focused on mechanical quantities (pressure, strain, force, weight and torque) as well as temperature and flow.

Product range

S.01.01.01 Angle, inclination, orientation

S.01.02.01 Force, load

S.01.02.02 Mass, weight, dosage

S.01.02.03 Stress, strain, elongation

S.01.02.04 Pressure, absolute

S.01.02.05 Pressure (gauge) – measuring error < 0.1 %

S.01.02.06 Pressure (gauge) – measuring error ≥ 0.1 %

S.01.02.08 Extreme pressure > 1000 bar

S.01.02.09 Differential pressure – measuring error < 0.1 %

S.01.02.10 Differential pressure – measuring error > 0.1 %

S.01.02.19 Torque

S.01.02.20 Moment of torsion, reaction moment

S.01.03.16 Flow

S.01.03.20 Flow velocity

S.01.04.01 Temperature, with contact

S.01.09.15 Blood pressure, non-invasive

S.01.09.16 Blood flow

S.01.09.17 Pulse rate

S.02.01 Strain gauge

S.02.03 Resistive sensor element

S.02.04 Piezoresistive sensing element

S.02.05 Thin film measuring cell

S.02.07 Thermoresistor

M.02 Modeling and simulation, HiL

M. X-ray inspection

M. Optical 3-D measuring process, dimension testing system

M. Electron microscopy (SEM)

M. Surface - roughness

M. Surface - topography

M. Surface - layer thickness

M. Finite Element Calculation, FEM

M. Electrodynamic oscillation testing system

D. Mechanical parameter

D. Dynamic parameter

D. Medical parameter

D. Mass, weight, weighting, dosing

D. Thin film technology

D. Microstructuring of silicon

D. Assembly and packaging

D. Micro fluidic device

D.02.01 Strain gauge technology

D.02.12 Microsensor technology

D.02.14 Microfluidics, micropneumatics

D.02.15 Micromechanics, microstructuring