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Fraunhofer-Institut
f. Siliziumtechnologie ISiT

Fraunhoferstr. 1
25524 Itzehoe
Germany
phone+49 4821 17-4233
fax+49 4821 17-4250
emailklaus.reimer@isit.fraunhofer.de
urlhttp://www.isit.fraunhofer.de

Design, development and fabrication of microelectronic components as well as microsensors, -actuators and further microsystems technology components; fabrication of prototypes and customer specific series (access to commercial production facilities, e.g. MEMS Foundry Itzehoe, X-FAB); analysis of quality and reliability of electronic assemblies; housing and packaging for microsystems.

D.02.03 Thin film technology

D.02.04 Semiconductor technology

D.02.11 Microsystems technology MST / Micro-Electro-Mechanical-Systems MEMS

D.02.12 Microsensor technology

D.02.13 Microactuator technology

D.02.14 Microfluidics, micropneumatics

D.02.15 Micromechanics, microstructuring

D.02.16 Integrated optics, microoptics

D.02.17 Microelectronics

D.02.19 Assembly and packaging

D.02.28 Etching technology

D.02.29 Galvanic processing

D.02.41 Other services concerning sensor systems and actuators

D.02.43 Prototype manufacture

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