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Technische Universität Chemnitz
IMH - Inst. f. Mikrosystem- u. Halbleitertechnik
Reichenhainer Straße 70
09126 Chemnitz
Germany
09126 Chemnitz
Germany
phone+49 371 531-24430
fax+49 371 531-24439
fax+49 371 531-24439
Functional design and analysis of micromechanical components, development and implementation of design tools and methods, simulation and experimental system analysis on microstructure, micro system and device level, investigations in micro macro coupling techniques (interface analysis)