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Fraunhofer-Institut
f. Mikrotechnik und Mikrosysteme IMM

Carl-Zeiss-Straße 18-20
55129 Mainz
Germany
phone+49 6131 990-318
fax+49 6131 990-205
emailStefan.Schmitt@imm.fraunhofer.de
urlhttp://www.imm.fraunhofer.de

The micro sensorics group at the Fraunhofer Institute for Microengineering and Microsystems IMM develops custom sensor solutions. Comprehensive competencies in design of micro components and their system integration combined with a wide spectrum of micro fabrication technologies such as mechanical precision engineering, laser machining, silicon and thin film technology are a unique feature. Applications range from industrial analytics to aerospace up to medical diagnostics.

D.01.02.04.02 Mechanical parameter

D.01.02.04.04 Thermal parameter

D.01.02.04.05 Caloric parameter

D.01.02.04.08 Optical parameter

D.01.02.04.12 Chemical parameter

D.01.02.04.13 Biological parameter

D.01.02.04.14 Medical parameter

D.01.02.08.02 Thin film technology

D.01.02.08.03 Precision mechanics

D.01.02.08.08 Microstructuring of silicon

D.01.02.08.09 Micro Systems Technologies MST, Micro-Electro-Mechanical-Systems MEMS

D.01.02.08.10 Microstructuring of other material (glas, ceramic, metal, polymer)

D.01.02.08.11 Lithography (E-beam-, UV-, X-ray lithography)

D.01.02.08.12 Galvanic processing

D.01.02.08.13 Plasma-/surface technology

D.01.02.08.15 Replication technology (Injection molding, hot embossing)

D.01.02.08.17 Microoptics, integrated optics

D.01.02.08.19 Assembly and packaging

D.01.02.08.21 Micro fluidic device

D.01.03.02 Component simulation, particularly with FEM

D.01.03.07 Optics simulation, raytracing

D.01.04.01 Assembly and packaging

D.01.04.02 Packaging

D.01.04.10 Assembly and packaging for medical technology

D.04.10 Consulting in Micro Systems Technologies, MEMS

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